Preface |
|
xi | |
Acknowledgments |
|
xiii | |
|
|
1 | (10) |
|
Microfluidics - The Emerging Technology |
|
|
1 | (6) |
|
|
1 | (3) |
|
|
4 | (2) |
|
|
6 | (1) |
|
Milestones of Microfluidics |
|
|
7 | (2) |
|
|
7 | (1) |
|
|
8 | (1) |
|
|
9 | (2) |
|
|
10 | (1) |
|
|
11 | (56) |
|
|
11 | (9) |
|
|
13 | (2) |
|
The Three States of Matter |
|
|
15 | (1) |
|
|
16 | (4) |
|
Continuum Fluid Mechanics at Small Scales |
|
|
20 | (27) |
|
|
21 | (6) |
|
|
27 | (2) |
|
|
29 | (5) |
|
|
34 | (6) |
|
Low Reynolds Number Flows |
|
|
40 | (2) |
|
|
42 | (3) |
|
|
45 | (2) |
|
|
47 | (6) |
|
|
48 | (3) |
|
|
51 | (2) |
|
|
53 | (9) |
|
|
54 | (3) |
|
|
57 | (3) |
|
|
60 | (2) |
|
|
62 | (5) |
|
|
64 | (1) |
|
|
65 | (2) |
|
Fabrication Techniques for Microfluidics |
|
|
67 | (70) |
|
|
67 | (15) |
|
|
67 | (2) |
|
|
69 | (9) |
|
|
78 | (2) |
|
Pattern Transfer Techniques |
|
|
80 | (2) |
|
Silicon-Based Micromachining Techniques |
|
|
82 | (16) |
|
Silicon Bulk Micromachining |
|
|
82 | (8) |
|
Silicon Surface Micromachining |
|
|
90 | (8) |
|
Polymer-Based Micromachining Techniques |
|
|
98 | (20) |
|
|
98 | (6) |
|
Polymeric Surface Micromachining |
|
|
104 | (3) |
|
|
107 | (5) |
|
|
112 | (4) |
|
|
116 | (2) |
|
Other Micromachining Techniques |
|
|
118 | (4) |
|
|
118 | (3) |
|
|
121 | (1) |
|
Assembly and Packaging of Microfluidic Devices |
|
|
122 | (5) |
|
Wafer Level Assembly and Packaging |
|
|
122 | (2) |
|
|
124 | (3) |
|
|
127 | (10) |
|
|
128 | (1) |
|
Tissue and Cellular Response |
|
|
128 | (1) |
|
|
128 | (1) |
|
|
129 | (1) |
|
|
129 | (8) |
|
Experimental Flow Characterization |
|
|
137 | (70) |
|
|
137 | (7) |
|
|
138 | (1) |
|
|
138 | (6) |
|
|
144 | (19) |
|
Fundamental Physics Considerations of Micro-PIV |
|
|
144 | (11) |
|
Special Processing Methods for Micro-PIV Recordings |
|
|
155 | (5) |
|
Advanced Processing Methods Suitable for Both Micro/Macro-PIV Recordings |
|
|
160 | (3) |
|
|
163 | (13) |
|
|
163 | (5) |
|
|
168 | (3) |
|
|
171 | (2) |
|
Flow in Microfluidic Biochip |
|
|
173 | (2) |
|
|
175 | (1) |
|
Extensions of the Micro-PIV technique |
|
|
176 | (31) |
|
|
176 | (7) |
|
Microparticle Image Thermometry |
|
|
183 | (12) |
|
|
195 | (2) |
|
Particle Tracking Velocimetry |
|
|
197 | (4) |
|
|
201 | (1) |
|
|
201 | (6) |
|
Microfluidics for External Flow Control |
|
|
207 | (40) |
|
Velocity and Turbulence Measurement |
|
|
207 | (15) |
|
|
208 | (4) |
|
|
212 | (10) |
|
|
222 | (4) |
|
|
223 | (1) |
|
|
224 | (1) |
|
|
225 | (1) |
|
|
226 | (21) |
|
|
227 | (2) |
|
|
229 | (3) |
|
|
232 | (2) |
|
|
234 | (9) |
|
|
243 | (2) |
|
|
245 | (2) |
|
Microfluidics for Internal Flow Control: Microvalves |
|
|
247 | (46) |
|
|
250 | (4) |
|
|
250 | (2) |
|
|
252 | (1) |
|
|
253 | (1) |
|
Pressure Compensation Design |
|
|
253 | (1) |
|
|
254 | (3) |
|
|
254 | (1) |
|
|
255 | (2) |
|
|
257 | (6) |
|
Thermopneumatic Actuators |
|
|
257 | (4) |
|
|
261 | (2) |
|
|
263 | (8) |
|
|
263 | (1) |
|
|
264 | (4) |
|
Shape-Memory Alloy Valves |
|
|
268 | (3) |
|
|
271 | (4) |
|
|
271 | (2) |
|
|
273 | (2) |
|
|
275 | (6) |
|
|
275 | (4) |
|
|
279 | (2) |
|
|
281 | (2) |
|
Electromagnetic Actuators |
|
|
281 | (1) |
|
|
281 | (2) |
|
|
283 | (2) |
|
|
285 | (8) |
|
Capillary-Force Actuators |
|
|
285 | (3) |
|
|
288 | (1) |
|
|
289 | (1) |
|
|
289 | (4) |
|
Microfluidics for Internal Flow Control: Micropumps |
|
|
293 | (50) |
|
|
295 | (23) |
|
|
295 | (2) |
|
|
297 | (7) |
|
|
304 | (4) |
|
Valveless Rectification Pumps |
|
|
308 | (5) |
|
|
313 | (2) |
|
|
315 | (2) |
|
|
317 | (1) |
|
|
318 | (16) |
|
|
318 | (9) |
|
Surface Tension Driven Pumps |
|
|
327 | (4) |
|
|
331 | (1) |
|
|
332 | (2) |
|
Scaling Law for Micropumps |
|
|
334 | (9) |
|
|
336 | (1) |
|
|
337 | (6) |
|
Microfluidics for Internal Flow Control: Microflow Sensors |
|
|
343 | (30) |
|
|
345 | (9) |
|
Differential Pressure Flow Sensors |
|
|
345 | (4) |
|
|
349 | (3) |
|
|
352 | (1) |
|
|
352 | (1) |
|
Electrohydrodynamic Flow Sensors |
|
|
353 | (1) |
|
|
354 | (19) |
|
|
354 | (5) |
|
Thermoresistive Flow Sensors |
|
|
359 | (4) |
|
Thermocapacitive Flow Sensors |
|
|
363 | (1) |
|
Thermoelectric Flow Sensors |
|
|
364 | (1) |
|
Thermoelectronic Flow Sensors |
|
|
365 | (3) |
|
Pyroelectric Flow Sensors |
|
|
368 | (1) |
|
|
369 | (1) |
|
|
369 | (1) |
|
|
370 | (3) |
|
Microfluidics for Life Sciences and Chemistry |
|
|
373 | (80) |
|
|
373 | (6) |
|
|
374 | (2) |
|
|
376 | (3) |
|
|
379 | (7) |
|
|
380 | (3) |
|
|
383 | (3) |
|
|
386 | (15) |
|
|
389 | (5) |
|
|
394 | (7) |
|
|
401 | (22) |
|
|
403 | (1) |
|
|
404 | (19) |
|
|
423 | (11) |
|
|
424 | (4) |
|
|
428 | (6) |
|
|
434 | (19) |
|
|
435 | (2) |
|
|
437 | (2) |
|
|
439 | (1) |
|
|
440 | (2) |
|
|
442 | (3) |
|
|
445 | (8) |
Appendix A List of Symbols |
|
453 | (4) |
Appendix B Resources for Microfluidics Research |
|
457 | (2) |
Appendix C Abbreviations of Different Plastics |
|
459 | (2) |
Appendix D Linear Elastic Deflection Models |
|
461 | (2) |
About the Authors |
|
463 | (1) |
Index |
|
465 | |