Precision Motion Control
by Tan, K. K.; Lee, Tong Heng; Huang, SunanEdition: 2nd
Format: Hardcover
Pub. Date: 2008-01-08
Publisher(s): Springer Verlag
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Summary
Applications of precision engineering, generally defined as manufacturing to tolerances that are better than one part in 105, abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), co-ordinate measuring machines, precision metrology systems (e.g., scanning probe microscopy), and robot/machine tools to carry out micro-assembly (e.g., micro-electro-mechanical systems) and delicate short-wavelength laser processes.
Table of Contents
| Introduction | p. 1 |
| Fields Requiring Precision Control | p. 1 |
| Precision Engineering | p. 1 |
| Micromanufacturing | p. 3 |
| Biotechnology | p. 6 |
| Nanotechnology | p. 7 |
| Precision Machines and Tools | p. 8 |
| Applications of Precision Motion Control Systems | p. 9 |
| Semiconductor | p. 9 |
| Magnetic and Optical Memory Manufacturing | p. 9 |
| Optical Manufacturing | p. 9 |
| High-resolution Imaging | p. 9 |
| Precision Metrology | p. 10 |
| Scope of the Book | p. 10 |
| Precision Tracking Motion Control | p. 11 |
| Piezoelectric Actuators | p. 11 |
| Types of Piezoelectric Actuator Configuration | p. 11 |
| Mathematical Model | p. 14 |
| Adaptive Control | p. 20 |
| Permanent Magnet Linear Motors (PMLM) | p. 24 |
| Types of PMLM | p. 27 |
| Mathematical Model | p. 30 |
| Force Ripples | p. 31 |
| Friction | p. 33 |
| Composite Control | p. 34 |
| Control Enhancement with Accelerometers | p. 44 |
| Ripple Compensation | p. 51 |
| Disturbance Observation and Cancellation | p. 54 |
| Robust Adaptive Control | p. 65 |
| Iterative Learning Control | p. 72 |
| Automatic Tuning of Control Parameters | p. 83 |
| Relay Auto-tuning | p. 84 |
| Relay with Delay | p. 85 |
| Two-channel Relay Tuning | p. 87 |
| Friction Modelling Using Relay Feedback | p. 87 |
| Friction Identification Method | p. 88 |
| Simulation | p. 91 |
| Initialisation of Adaptive Control | p. 92 |
| Optimal Features Extraction from Relay Oscillations | p. 92 |
| Experiments | p. 96 |
| Co-ordinated Motion Control of Gantry Systems | p. 101 |
| Co-ordinated Control Schemes | p. 103 |
| Classical Master/Slave Approach | p. 103 |
| Set-point Co-ordinated Control | p. 104 |
| Fully Co-ordinated Control | p. 105 |
| Simulation Study | p. 107 |
| Control Task | p. 107 |
| Results | p. 107 |
| Experiments | p. 108 |
| XY Table-Configuration I | p. 110 |
| XY Table-Configuration II | p. 112 |
| Adaptive Co-ordinated Control Scheme | p. 114 |
| Dynamic Modelling of Gantry Stage | p. 116 |
| Model-based Adaptive Control Design | p. 121 |
| Stability Analysis | p. 123 |
| Software Simulation | p. 123 |
| Implementation Results | p. 125 |
| Geometrical Error Compensation | p. 129 |
| Overview of the Laser Measurement System | p. 130 |
| Components of the Laser Measurement System | p. 131 |
| Laser Head | p. 131 |
| Interferometer and Reflector | p. 133 |
| Measurement Receiver | p. 133 |
| Measurement and Control Electronics | p. 134 |
| Overview of Laser Calibration | p. 134 |
| Linear Measurement | p. 135 |
| Angular Measurement | p. 136 |
| Straightness Measurement | p. 136 |
| Squareness Measurement | p. 138 |
| Roll Measurement Using a Level-sensitive Device | p. 139 |
| Accuracy Assessment | p. 139 |
| Factors Affecting Measurement Accuracy | p. 140 |
| Linear Measurement Errors | p. 140 |
| Angular Measurement Errors | p. 143 |
| Straightness Measurement Errors | p. 143 |
| Environmental Conditions | p. 143 |
| Overall Error Model | p. 144 |
| Look-up Table for Geometrical Errors | p. 146 |
| Parametric Model for Geometrical Errors | p. 148 |
| Error Modelling with Radial Basis Functions | p. 148 |
| Parameter Error Approximations | p. 149 |
| Experiments | p. 155 |
| Error Modelling with Multi-layer Neural Networks | p. 156 |
| Compensation of Machines with Random Errors | p. 161 |
| Probabilistic Methodology | p. 162 |
| Experiments | p. 163 |
| Electronic Interpolation Errors | p. 171 |
| Heydemann Interpolation Method | p. 172 |
| Interpolation Bounds | p. 174 |
| Calibration and Compensation | p. 175 |
| Enhanced Interpolation Method | p. 175 |
| Principle of Enhanced Interpolation Method | p. 176 |
| Construction of a Look-up Table | p. 177 |
| Experiments | p. 182 |
| Parametric Model for Interpolation | p. 184 |
| Principles of Interpolation Approach | p. 185 |
| Precompensation Stage | p. 186 |
| Interpolation Stage | p. 189 |
| Experimental Study | p. 190 |
| Vibration Monitoring and Control | p. 195 |
| Mechanical Design to Minimise Vibration | p. 196 |
| Stability and Static Determinacy of Machine Structures | p. 196 |
| Two-dimensional Structures | p. 197 |
| Three-dimensional Structures | p. 201 |
| Adaptive Notch Filter | p. 207 |
| Fast Fourier Transform | p. 209 |
| Simulation | p. 209 |
| Experiments | p. 209 |
| Real-time Vibration Analyser | p. 210 |
| Learning Mode | p. 212 |
| Monitoring Mode | p. 214 |
| Diagnostic Mode | p. 217 |
| Experiments | p. 218 |
| Remote Monitoring | p. 222 |
| Implementation | p. 225 |
| Other Engineering Aspects | p. 231 |
| Specifications | p. 232 |
| Selection of Motors and Drives | p. 232 |
| Selection of Encoders | p. 232 |
| Control Platform | p. 233 |
| Hardware Architecture | p. 233 |
| Software Development Platform | p. 236 |
| User Interface | p. 236 |
| Accuracy Assessment | p. 239 |
| Digital Communication Protocols | p. 241 |
| Fieldbus Protocol Stack | p. 242 |
| Common Fieldbuses | p. 245 |
| Laser Calibration Optics, Accessories and Set-up | p. 253 |
| References | p. 261 |
| Index | p. 271 |
| Table of Contents provided by Ingram. All Rights Reserved. |
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